Products
Carbon Tetrafluoride CF4 R14 Electronic Gas
Product Description
Carbon tetrafluoride, also known as tetrafluoromethane, has the chemical formula CF4. It can be regarded as either a halogenated hydrocarbon (organic substance) or an inorganic compound. It is a colorless gas at normal temperature and pressure and is insoluble. In water, soluble in benzene and chloroform, it is mainly used in the plasma etching process of various integrated circuits. It is also used as a coolant for laser gas, low-temperature refrigerant, solvent, lubricant, insulating material and infrared detector tube.
Specification
Specification |
99.999% |
Oxygen+Argon |
≤1ppm |
Nitrogen |
≤4 ppm |
Moisture(H2O) |
≤3 ppm |
HF |
≤0.1 ppm |
CO |
≤0.1 ppm |
CO2 |
≤1 ppm |
SF6 |
≤1 ppm |
Halocarbynes |
≤1 ppm |
Total Impurities |
≤10 ppm |
Typical Application
Package & Shipping
Product |
Carbon Tetrafluoride CF4 |
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Package Size |
40Ltr Cylinder |
50Ltr Cylinder |
|
Filling Net Weight/Cyl |
30Kgs |
38Kgs |
|
QTY Loaded in 20’Container |
250 Cyls |
250 Cyls |
|
Total Net Weight |
7.5 Tons |
9.5 Tons |
|
Cylinder Tare Weight |
50Kgs |
55Kgs |
|
Valve |
CGA 580 |
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