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Nitrogen Trifluoride NF3 Electronic Gas

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Nitrogen Trifluoride NF3 Electronic Gas

CAS No.: 7783-54-2

EINECS No.: 232-007-1

UN No.: UN2451

DOT Class: 2.2&5.1

Purity: 99.99%-99.999%

Standard Packaging: 40L, 47L, Y-440L cylinder

Molecular Weight: 71.0019 g/mol

Density: 2.96 kg/m³

Chemical Property: Non-flammable Gas, Oxidizing Agent

Standard Grade: Industrial Grade, Electronic Grade

    Product Description

    Nitrogen trifluoride is an inorganic compound with the chemical formula NF3. It is a colorless gas at room temperature and pressure, insoluble in water, a strong oxidant but with very stable chemical properties. It is an excellent plasma etching gas in the microelectronics industry and can also be used as a high-energy fuel.

    Typical Application

    • Gas1
      Semiconductor Manufacturing ‌
      In the manufacture of transistors, integrated circuits and other devices, nitrogen trifluoride is used to clean the surface of silicon wafers, remove organic and inorganic impurities and ensure the surface is flat and clean.
    • Gas2
      ‌‌Metal Processing
      Nitrogen trifluoride can be used for cleaning and coating preparation of metal surfaces. It can effectively remove oil and oxides on the metal surface, reducing the difficulty of subsequent processing.
    • Gas3
      ‌‌High-energy Chemical Lasers
      In the military and scientific research fields, nitrogen trifluoride is used as a fluorine source in high-energy chemical lasers.
    • Gas4
      ‌‌Solar Photovoltaic Industry
      High-purity nitrogen trifluoride plays a role in the production of thin-film silicon solar cells, especially in the manufacture of amorphous silicon thin-film solar cells.
  • ‌‌‌Oxidant
    In mining and rocket technology, nitrogen trifluoride can be used as an oxidant to improve the combustion efficiency of fuel‌.
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    Package & Shipping

    Specification

    99.99%

    99.999%

    Carbon Tetrafluoride

    ≤40ppmv

    ≤20ppmv

    Nitrogen

    ≤10ppmv

    ≤50ppmv

    Oxygen+Argon

    ≤5ppmv

    ≤3ppmv

    Carbon Monoxide

    ≤1ppmv

    ≤1ppmv

    Carbon Dioxide

    ≤3ppmv

    ≤0.5ppmv

    Nitrous Oxide

    ≤3ppmv

    ≤1ppmv

    Sulfur Hexafluoride

    ≤3ppmv

    ≤2ppmv

    Moisture

    ≤1ppmv

    ≤1ppmv

    Express as HF

    ≤1ppmv

    ≤1ppmv

    Package & Shipping

    Product

    Nitrogen Trifluoride NF3​​​​

    Packaging Size​

    47Ltr Cylinder

    Y-440Ltr Cylinder

    Filling Net Weight/Cyl

    20 Kgs

    200 Kgs

    QTY Loaded in 20'Container

    200 Cyls

    6 Cyls

    Total Net Weight​​​​​​

    4 Tons

    1.2 Tons

    Cylinder Tare Weight​​​​​​

    52 Kgs

    680 Kgs

    Valve

    CGA330/DISS640

    • Gas5
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    • Gas7
    • Gas8