Electronic gases
0102030405
Tungsten Hexafluoride WF6 Electronic Gas
Description
Tungsten hexafluoride is an inorganic compound with the chemical formula WF6, a colorless gas at room temperature and pressure, and soluble in most organic solvents.
Product Content
|
Specification |
99.999% |
||
|
CF4 |
<0.5ppm |
K |
≤5ppb |
|
O2 |
<0.5ppm |
Mn |
≤10ppb |
|
N2 |
＜1ppm |
Na |
≤5ppb |
|
CO |
＜0.5ppm |
Th |
≤0.1ppb |
|
CO2 |
＜0.5ppm |
Ti |
≤10ppb |
|
SiF4 |
＜0.5ppm |
Li |
≤10ppb |
|
SF6 |
＜0.5ppm |
U |
≤0.05ppb |
|
HF |
＜ppm |
Zn |
≤10ppb |
|
Al |
≤10ppb |
Si |
≤10ppb |
|
As |
≤10ppb |
Pb |
≤10ppb |
|
B |
≤10ppb |
P |
≤2ppb |
|
Ca |
≤5ppb |
Mg |
≤10ppb |
|
Cd |
≤2ppb |
Ni |
≤20ppb |
|
Cr |
≤10ppb |
Cu |
≤5ppb |
|
Fe |
≤10ppb |
Mo |
≤10ppb |
|
Total impurities of other metal |
≤500 |
||
Package & Shipping
|
Product |
Tungsten hexafluoride WF6 |
||
|
Package Size |
10Ltr Cylinder |
50Ltr Cylinder |
/ |
|
Filling Net Weight/Cyl |
15KGS |
50kgs |
|
|
QTY Loaded in 20’Container |
500Cyls |
200Cyls |
|
|
Cylinder Tare Weight |
14kgs |
55kgs |
|
|
Valve |
CGA638 |
||
Typical Application
Tungsten fluoride (WF6) is the only stable and industrially produced tungsten fluoride variety. It is mainly used as a raw material for tungsten metal chemical vapor deposition (CVD) process in the electronics industry, and the WSi2 made from it can be used as a wiring material in large-scale integrated circuits (LSI), and can also be used as a raw material for semiconductor electrodes, fluorinating agents, polymerization catalysts and optical materials. Non-electronic applications of WF6: Tungsten can be made hard to produce tungsten carbide on the surface of steel by CVD technology to improve the surface properties of steel, and can also be used to manufacture certain tungsten components, such as tungsten pipes and crucibles.