Boron Trichloride (BCl₃)
Product Overview
Boron trichloride (BCl₃)is a critical etch gas for aluminum metallization and metal layer patterning in semiconductor manufacturing. It is also widely used in plasma etching processes wHere high selectivity to underlying materials is required.BCl₃ offers excellent etch rates for aluminum and its alloys while providing controlled profile angles and minimal residue formation .
According to SEMI data cited in industry research, electronic specialty gases account for approximately 13% of wafer manufacturing costs, with etch gases like BCl₃ representing a significant portion of this expenditure. The global electronic specialty gas market is projected to reach $5.04 billion in 2026 .
Technical Specifications
| Parameter | Semiconductor Grade | Ultra-High Purity Grade |
|---|---|---|
| Purity | ≥99.99% (4N) | ≥99.999% (5N) |
| Chlorine (Cl₂) | <10 ppm | <5 ppm |
| Oxygen (O₂) | <5 ppm | <2 ppm |
| Moisture (H₂O) | <2 ppm | <1 ppm |
| Carbonyl Chloride (COCl₂) | <5 ppm | <2 ppm |
| Metallic Impurities | <100 ppb each | <50 ppb each |
Applications
Semiconductor Manufacturing
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Aluminum and aluminum alloy etching for interconnect layers
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Metal line patterning in logic and memory devices
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Reactive ion etching (RIE) for high aspect ratio structures
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Residue removal after metal deposition processes
Display Manufacturing
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Metal layer patterning in TFT-LCD and OLED fabrication
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Electrode formation for display pixels
LED Manufacturing
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Gallium nitride (GaN) and related III-V compound etching
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Mesa structure formation for optoelectronic devices
Market Dynamics
According to Huao Industry Research Institute data, China's electronic specialty gas market reached 28.08 billion RMB in 2024, with the integrated circuit sector representing 42% of total demand. BCl₃ demand is driven by:
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Semiconductor capacity expansion across Asia-Pacific
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Advanced packaging requiring precise metal interconnect etching
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Display manufacturing capacity additions in China
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LED and optoelectronic device production growth
The transition to advanced metal interconnect schemes, including copper interconnects with aluminum barrier layers, continues to drive demand for specialized etch gas mixtures containing BCl₃ .
Safety & Handling
BCl₃ is a toxic, corrosive, and moisture-sensitive gas:
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Reacts violently with water, producing hydrogen chloride (HCl)
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Requires stainless steel delivery systems with strict moisture control
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Store in well-ventilated gas cabinets with continuous monitoring
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Use with dedicated toxic gas monitoring and alarm systems
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Personal protective equipment required for handling
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Emergency response protocols for potential releases
Cylinder Preparation
Due to BCl₃'s corrosive nature, specialized cylinder preparation is required:
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Electropolished stainless steel cylinders
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Passivation treatments to minimize adsorption
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Stainless steel diaphragm valves
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Dedicated cylinders for corrosive gas applications
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Strict moisture control during filling and packaging
Quality Assurance
Chengdu Hongjin Chemical Co., Ltd. provides electronic-grade boron trichloride with:
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Certificate of Analysis (COA) for each batch
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Traceability to national metrology standards
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ISO 9001:2025 certified quality management
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Specialized cylinder handling for corrosive gases
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Technical support for etch process optimization
References:
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SEMI Electronic Specialty Gases Data
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Huao Industry Research Institute, March 27, 2026
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TECHCET Electronic Specialty Gases Market Report, 2026