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Carbon Tetrafluoride (CF₄) — China Market Reaches 2.08 Billion RMB in 2024, Growing 7.44%
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Carbon Tetrafluoride (CF₄) — China Market Reaches 2.08 Billion RMB in 2024, Growing 7.44%

2026-04-18

MArket Overview

China's carbon tetrafluorideindustry is in a phase of techNOlogical upgrade and market expansion. According to Chyxx (February 4, 2026),China's CF₄ market size reached approximately 20.79 billion RMB in 2024, representing a 7.44% year-on-year increase.

Global Semiconductor CF₄ Market

According to QYResearch (January 14, 2026), the global semiconductor-grade CF₄ market is projected to reach $751 million by 2032, with a CAGR of 5.9% from 2026 to 2032.

Production and Pricing Data:

  • 2024 global semiconductor CF₄ production reached 26,500 metric tons

  • Average selling price was $18.60 per kilogram (approximately 135 RMB/kg)

Key Growth Drivers

High-Purity Alternatives: Demand for ultra-high purity CF₄ (5N/6N grades) is increasing as semiconductor process nodes advance. Domestic substitution is accelerating as Chinese producers develop advanced purification capabilities.

Emerging Applications: Beyond semiconductor etching, CF₄ finds applications in chamber cleaning, display manufacturing, and as a refrigerant (R14). The transition to green alternatives and high-purity variants is driving structural market change.

Applications

  • Silicon dioxide (SiO₂) etching for dielectric layer patterning

  • Silicon nitride (Si₃N₄) etching

  • CVD chamber cleaning

  • Refrigerant (R14) applications

  • Calibration gas mixtures

Sources:

  • QYResearch, January 14, 2026

  • Chyxx (China Industry Information), February 4, 2026