Carbon Tetrafluoride (CF₄)
Product Overview
Carbon tetrafluoride(CF₄, tetrafluoromethane) is the most widely used perfluorocarbon (PFC) etch gas in semiConductor manufacturing, serving as the primary etchant for silicon dioxide (SiO₂) and silicon nitride (Si₃N₄) dielectric layers. With a global warming potential (GWP) approximately 6,500 times that of CO₂, CF₄ is subject to increasing environmental scrutiny while remaining irreplaceable for many etch applications due to its favorable selectivity and etch rate characteristics .
According to gasworld industry analysis, Japan's specialty gas sector has undergone significant restructuring, with Resonac discontinuing CF₄production at its Kawasaki plant and sourcing the gas from a joint venture in China. This shift reflects broader supply chain realignment, with China NOw accounting for nearly 90% of fluorine-based specialty gas supply into Japan .
Technical Specifications
| Parameter | Semiconductor Grade | Ultra-High Purity Grade |
|---|---|---|
| Purity | ≥99.999% (5N) | ≥99.9999% (6N) |
| Oxygen (O₂) | <5 ppm | <2 ppm |
| Nitrogen (N₂) | <5 ppm | <2 ppm |
| Moisture (H₂O) | <1 ppm | <0.5 ppm |
| Carbon Dioxide (CO₂) | <5 ppm | <2 ppm |
| Metallic Impurities | <100 ppb each | <50 ppb each |
Applications
Semiconductor Etching
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Silicon dioxide (SiO₂) etching for dielectric layer patterning
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Silicon nitride (Si₃N₄) etching for memory device formation
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Silicon trench etching for isolation structures
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Selectivity optimization when combined with oxygen (CF₄/O₂ mixtures)
Chamber Cleaning
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CVD tool cleaning following deposition processes
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Removal of silicon-based residues from reaction chambers
Display Manufacturing
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Etching of silicon-based layers in TFT-LCD production
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Cleaning applications in OLED fabrication
Environmental Considerations
CF₄'s high global warming potential has prompted significant industry investment in:
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Point-of-use abatement systems achieving >90% destruction efficiency
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Alternative etch gases with lower environmental impact (C₄F₈, C₅F₈, etc.)
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Recycling and recovery technologies for PFC gases
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Process optimization to reduce gas consumption
Market Dynamics
According to TECHCET data, the global electronic specialty gas market is projected to reach $5.04 billion in 2026, growing 9% year-on-year. CF₄ demand remains stable despite environmental pressures, as its etch chemistry remains difficult to replace for many dielectric etching applications .
The Asia-Pacific region dominates consumption, with Taiwan, South Korea, China, and Japan accounting for over 70% of global semiconductor manufacturing capacity. CF₄ supply chains have increasingly localized to serve regional fab clusters .
Safety & Handling
CF₄ is a non-flammable, non-toxic gas but presents asphyxiation risk in confined spaces:
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Store in well-ventilated areas
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Use with properly calibrated flow control equipment
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Monitor oxygen levels in enclosed work areas
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Utilize cylinder gas monitoring systems for leak detection
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Follow semiconductor industry standard handling protocols
Quality Assurance
Chengdu Hongjin Chemical Co., Ltd. provides electronic-grade carbon tetrafluoride with:
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Certificate of Analysis (COA) for each batch with actual impurity levels
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Traceability to national and international standards
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ISO 9001:2025 certified quality management system
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Cylinder preparation for high-purity perfluorocarbon applications
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Technical support for process integration
References:
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gasworld Japan Electronics Gas Industry Analysis, March 2026
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TECHCET Electronic Specialty Gases Market Report, 2026
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IPCC Sixth Assessment Report, GWP Values