Chlorine (Cl₂) — Electronic Grade Prices Firm to 14,000–15,000 RMB/Ton in Q1 2026 as Semiconductor Etch Demand Sustains Market

Electronic grade chlorine (Cl₂), a critical etching gas for semiConductor manufacturing—particularly for aluminum, polysilicon, and other metal layer patterning—has maintained firm pricing in the first quarter of 2026, supported by steady demand from global wafer fabrication facilities and stable domestic supply. According to market tracking from Eastmoney Caifuhao, electronic grade chlorine prices remained in the 12,000–13,000 RMB per ton range during January and February 2026, with minimal fluctuation as the post‑holiday industrial gas market operated at subdued activity levels. By March 2026, following the resumption of full‑scale industrial production and the activation of semiconductor manufacturing supply chains, electronic grade chlorine prices increased by 10% to 15%, reaching the 14,000–15,000 RMB per ton range.

Chlorine is categorized as one of the key electronic specialty gases in the US semiconductor gases market, alongside nitrogen, oxygen, argon, helium, hydrogen, carbon dioxide, chlorine, ammonia, and silane. Its primary application is as a dry etching gas for semiconductor device fabrication—specifically for etching polysilicon, aluminum, and other metal layers—as well as for cleaning applications in certain semiconductor chambers. Purity requirements for semiconductor-grade chlorine typically demand 99.999% (5N) or higher, with extremely stringent control over moisture, oxygen, hydrocarbons, and particulate impurities.

The global etching gas market, of which chlorine‑based gases form a significant segment, is undergoing steady expansion. According to QYResearch, the global semiconductor‑grade etching gas market sales reached approximately RMB 7.462 billion in 2025 and are projected to reach RMB 12.41 billion by 2032, with a CAGR of 7.6% (2026–2032). The US market specifically categorizes etching gases into fluorine‑based, chlorine‑based, oxygen‑based, and bromine‑based chemistries, with chlorine and its compounds remaining essential for specific metal etch applications that canNOt be replaced by fluorine chemistry.

Despite the firm pricing observed thus far, electronic grade chlorine faces potential upward pressure as the broader specialty gas market tightens. The Middle East conflict has impacted chlorine’s raw material supply chain, as chlorine production depends on caustic soda/chlorine plants whose operations may be affected by energy cost increases. Additionally, the growth of aluminum metal etching in advanced packaging applications—where 3D chip stacking requires precise metal layer patterning—adds new demand drivers for chlorine.

The stability of electronic grade chlorine supply has made it a strategic alternative for certain etch applications where other specialty gases have experienced severe price surges. However, semiconductor fabs that rely on high‑purity chlorine for “aluminum metal etching” or “polysilicon dry etch” should still monitor supply conditions and consider diversifying sources where possible.

Sources: Eastmoney Caifuhao Market Tracking, March 2026; QYResearch Semiconductor‑Grade Etching Gas Report; US Semiconductor Gases Market Report