Hexafluoroethane (C₂F₆): Over 50% Domestic Market Share, A Pioneer in Fluorocarbon Electronic Specialty Gas Import Substitution

Hexafluoroethane (C₂F₆) is one of the most Commercially mature varieties among fluorocarbon electronic specialty gases, and also a pioneer in the import substitution process.

According to QYResearch, the global hexafluoroethane market was approximately USD 289 million in 2025 and is projected to reach USD 374 million by 2032, at a CAGR of 3.8% during 2026-2032.

In terms of industry structure, enterprises from Europe, the United States, and Japan have long dominated the global market, with representative players including France's Air Liquide, the UK's Linde Group, and Japan's Kanto Denka. However, domestic enterprises are accelerating their catch-up. Huate Gas (688268) is the first domestic enterprise to achieve mass production of high-purity hexafluoroethane for IC plasma etching, with over 50% domestic market share. Zhongchuan Special Gas also mass-produces hexafluoroethane and other high-purity fluorocarbon gases.

Hexafluoroethane is primarily used in plasma etching processes for semiconductor chips. As a foundational fluorocarbon etching gas, its market demand is closely tied to wafer fab capacity expansion and process upgrades. With the continued expansion of domestic wafer fabs and the deepening of import substitution, hexafluoroethane's market position as an electronic specialty gas with a relatively high localization rate is expected to further consolidate.

For enterprises building their fluorocarbon electronic specialty gas product portfolios, hexafluoroethane represents a cornerstone category with both market scale and a mature supply chain.