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High-Purity Ammonia (NH₃): The Unsung Hero of Nitride Deposition
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High-Purity Ammonia (NH₃): The Unsung Hero of Nitride Deposition

2026-03-26

MArket Dynamics: Electronic-grade ammonia(typically 6N, 99.9999% or higher) is a critical precursor for siliCon nitride (Si₃N₄) deposition via CVD and ALD processes. With the transition to 3D NAND structures featuring increasingly high aspect ratios, the demand forultra-high purity ammonia has grown substantially.

Purity Requirements: Advanced semiconductor processes require ammonia with:

  • Moisture content: <1 ppm

  • Oxygen content: <1 ppm

  • Metal impurities: <10 ppb per element

  • Particle counts: Strict limits for >0.1μm particles

Supply Landscape: Jinhong Gas has established itself as a key supplier, with ultra-high purity ammonia and high-purity nitrous oxide stable supply to SMIC, SK Hynix, and other leading semiconductor enterprises . The company has added 18 new semiconductor customers in the first half of 2025, covering the entire supply chain from substrate materials through manufacturing to packaging .

Market Outlook: As China continues to expand its domestic semiconductor manufacturing capacity, demand for high-purity ammonia is expected to grow in line with fab utilization rates. Analysts project continued tight supply for the highest purity grades, with prices remaining firm.

Price Indicators: While not subject to the same geopolitical volatility as noble gases, high-purity ammonia prices have seen gradual upward pressure due to energy costs and stricter environmental compliance requirements for production facilities.