Photolithography Gases — DUV and EUV Laser Gas Costs Surge as Helium, Neon, Krypton Prices Climb in Tandem

The full impact of the 2026 rare gas crisis is perhaps most acutely felt in the photolithography sector, where all major excimer laser gas Components—krypton, neon, argon, and fluorine—are simultaneously under price pressure.

EUV Helium at Historic Highs. The most extreme price increase affects extreme ultraviolet (EUV) lithography cooling gas. As of April 2026, 6N EUV helium—used to cool mirrors and optics in the world's most advanced chipmaking tools—is trading at 7,600–7,700 RMB per cubic meter under long-term contracts and up to 8,000 RMB per cubic meter in spot transactions. Under normal market conditions, these price levels would be unthinkable.

Heavy Dependence on EUV Helium. Advanced nodes (7nm and below) depend heavily on EUV lithography, which requires helium as a cooling medium to maintain precise thermal control. The current helium supply crisis has directly impacted EUV tool uptime and cost of ownership for leading foundries.

Neon and Krypton Pressures. DUV excimer laser gas mixtures (which use neon as a buffer gas and krypton as an excimer component) face their own supply constraints. Neon prices have surged 15–20×, while krypton, though not as severely affected, has also seen a tightening supply picture.

Wet Lithography Materials Also Under Pressure. The lithography supply chain extends beyond gases. Photolithography core consumable diluent raw material PGMEA (propylene glycol monomethyl ether acetate) prices are expected to rise 40–50%, with finished diluent manufacturers planning approximately 20% price increases for April 2026 shipments.

Total Impact on Fab Economics. The combination of higher rare gas prices, increased diluent costs, and rising raw material costs for other photolithography-related consumables is pushing wafer production costs higher across all nodes. These cost pressures are expected to feed through into semiconductor pricing later in 2026.

Outlook. Until rare gas supply stabilizes—a prospect unlikely in the near term given Middle East tensions and Eastern European supply vulnerability—photolithography gas costs will remain elevated. Semiconductor manufacturers are advised to review gas consumption patterns and consider process optimizations to reduce usage.

Sources: Shenzhen Securities News, April 2026; Semiconductor Industry Reporting, March 2026; Price Tracking Data, May 2026