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Semiconductor Process Gases — 13% of Wafer Manufacturing Cost
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Semiconductor Process Gases — 13% of Wafer Manufacturing Cost

2026-04-04

According to SEMI data cited by Hua Tai Securities, electronic specialty gases account for approximately 13% of wafer manufacturing costs, making tHem the second-largest material expense after silicon wafers .

Electronic gases encompass both electronic bulk gases and electronic specialty gases. Electronic specialty gases are primarily used in lithography, etching, deposition, cleaning, doping, and other process steps. Major categories include cleaning gases such as nitrogen trifluoride and metal vapor deposition gases such as tungsten hexafluoride .

According to TECHCET data, AI demand has driven strong memory chip capital expenditure growth, expected to accelerate electronic gas market growth in 2026. The transition to 3D NAND, HBM multilayer structures, advanced processes, and advanced packaging increases both consumption volume and value of electronic gases .

According to SK Hynix environmental impact assessment documents cited by Hua Tai Securities, as semiconductor processes upgrade (e.g., from 54nm to 10nm), unit consumption of nitrogen trifluoride, silane, and various other electronic gases increases significantly .

Sources:

  • SEMI Industry Data

  • TECHCET Market Research

  • Hua Tai Securities Research Report, March 19, 2026